Desktop Pro

The Desktop Pro is designed to address the need of high performance sputtering applications in a compact and economical desktop configuration.  Drawing on the strengths of Denton Vacuum’s engineering, automation, and industry leading range of sputtering technology, including our experience with optical coating solutions, the Desktop Pro is a truly remarkable product that requires less than 36” of countertop space.

Capable of sputtering dielectric and metal films with ease, the Desktop Pro can be outfitted with up to two (2), 2.0” diameter magnetrons. The magnetrons are inclined to a rotating substrate stage; an arrangement that yields excellent film thickness uniformity (better than 5%) over the entire diameter of the stage.  The system can be outfitted with either an RF, DC, or RF + DC power supply and optional magnetic to support the sputtering of ferromagnetic materials are available.  Power supply output switching allows a user to power two cathodes sequentially from a single power supply; a feature that can result in significant cost savings.

The Desk Top Pro comes standard with a 65 liter/second, compound turbomolecular pump for impressive base vacuum levels, short pump downs, and gas load handling.  An optical liquid nitrogen trap is available for those applications that demands high water vapour pumping speed. The operator interface uses a color touch-pad that offers high resolution graphics, manual operation and one-button automatic processes.

The Desktop Pro’s impressive vacuum deposition coating capabilities are supported by a comprehensive one-year warranty and application support from Denton Vacuum LLC’s team of skilled process engineers.  Quite simply, there is no better value available anywhere!

Denton Vacuum is proud to be your choice for systems that meet your vacuum metalization and other deposition needs.  With essential features such as thermal evaporation, we provide the solutions you need.

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Integrity

The Integrity® series is Denton Vacuum’s flagship system to produce optical coatings.  These systems range in size from 26” to 80” and all utilize evaporation technology as the deposition modality.  Most, if not all of these vacuum deposition systems are equipped with sources for ion beam assisted deposition and optical monitors are employed for the highest precision applications. 

The high end process requirements of this product line demand the highest levels of system automation.  Typical applications include anti-reflection coatings, narrow band-pass filters, hot/cold mirrors and color correcting mirrors.  All integrity systems can be optimised for depositing metals.

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Explorer

The Explorer series represents Denton’s workhorse offering in R&D systems.  The Explorer can be configured for thermal evaporation, electron beam evaporation, multi-cathode ion beam sputter deposition and PECVD.  Incorporating the same controls as the Discovery and Infinity product vacuum deposition system lines, the features and functionality of this new product line eclipse it’s replacement by an order of magnitude.  The Explorer may be equipped with various cryogenic, turbomolecular or diffusion pumping options.  A glass bell jar is the standard chamber configuration although a 14” steel chamber (height sizes to specific application) is the predominant configuration.

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Discovery HDG

Denton’s Discovery HDG is a complete, turnkey system that offers all and versatility needed for wide ranging development and production applications – a significantly better value than competitive systems.

System Features/Benefits

  • Turn-Key Process Packages for
  • Ion Beam Deposition & Ion Beam Assisted Deposition

High density films
Environmental stability
Stable deposition rates
Stoichiometry control

  • Ion Beam Etch & Reactive Ion Beam Etch

Excellent etch uniformity

  • Wide Range of Options

Ion Sources
Substrate Fixturing
End-point Control
RGA

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Discovery

The Discovery series represents Denton’s offerings in pilot-scale sputtering systems.  Utilizing a unique orientation of the sample to the sputtering sources, Discovery systems can process relatively large samples and achieve remarkable thickness uniformity using small ion beam sputter deposition sources.  This arrangement results in low target inventory costs and allows the system to be constructed with smaller sputtering power supplies, significantly lowering both the acquisition and operating costs of the delivered system.  As with all of our systems, our vacuum engineering and materials knowledge results in the best solutions for our customers.

Discovery systems all have multi-cathode capability and are available with a complete range of process capabilities (RF/DC/Pulse sputtering, co-sputtering, RF bias, three levels of heat up to 900 C, load locks, and magazine covery and Inassette feeders) to support thin film coating deposition on substrates up to 30” in diameter.  These systems are available in configurations from 18” to 35” and may be outfitted with either turbomolecular or cryogenic pumping packages.  Multiple automation platforms are available on this product line; choice driven by process complexity and required end-use versatility.

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DV-502B

The DV-502B is the newest addition to the proven line of DV-502 series of evaporators.  Since 1964, thousands of these units have been installed at universities and research labs throughout the world.

By using state-of-the-art electronic components and an advanced vacuum design, the DV-502B can rapidly and repeatedly cycle from atmosphere to high vacuum.

The DV-502B will reach 10 -4 Torr in a clean and outgassed system within 3 minutes, and 2 x 10 -5 Torr within 4 minutes in the standard 12” dia. X 12” high bell jar.  If the system is kept clean and properly operated, no discernible contamination is produced in preparing specimens for electron miscroscopy.

The 1 kVA evaporation power supply permits evaporation of most materials used in electron microscope specimen preparation including carbon, gold, gold palladium, etc., and can handle many of the evaporations required in various metalizing, optical coating and other applications.  The DV-502B has sufficient speed to handle all of the standard Denton accessories as well as larger bell jars up to 14” dia. X 18” high.

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Voyager

The addition of the Voyager to Denton’s range of deposition platforms provides the thin film specialist with the ability to deposit a variety of films previously difficult to produce due to the geometry of the part or the extended deposition period required.  The Voyager utilizes proven hardware configurations developed by Denton Vacuum.  The result is a robust mechanical package supported by established controls for ease of operation and intuitive recipe building. 

Designed to meet the thin film industry’s requirements for conformal coatings, low temperature processing and high intrinsic uniformity, the Voyager offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.

Particular benefits of PECVD process include an unlimited source of deposition material and the ability to produce defined stresses in the film.

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